Characterization of Nanocrystalline Diamond/Amorphous Composite Carbon Films Prepared by PECVD Technology
نویسندگان
چکیده
منابع مشابه
Deposition and characterization of silicon carbon nitride films prepared by RF-PECVD with capacitive coupling
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ژورنال
عنوان ژورنال: Physics Procedia
سال: 2012
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2012.03.650